M00000433
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ASTM F24-04 Standard Method for Measuring and Counting Particulate Contamination on Surfaces
standard by ASTM International, 09/01/2004
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Availability date: 07/24/2021
1.1 This method covers the size distribution analysis of particulate contamination, 5 m or greater in size, either on, or washed from, the surface of small electron-device components. A maximum variation of two to one (33 % of the average of two runs) should be expected for replicate counts on the same sample.
Note 1--For satisfactory results on clean parts, it is recommended that all procedures involved in sample preparation be conducted under a dust shield.