Full Description

1.1This test method covers testing components for total moisture contribution to a gas distribution system at ambient temperature. In addition, the test method allows testing at elevated ambient temperatures as high as 70C and of the component moisture capacity and recovery.

1.2This test method applies to in-line components containing electronics grade materials such as those used in semiconductor gas distribution systems.

1.3Limitations:

1.3.1This test method is limited by the sensitivity of current instrumentation, as well as by the response time of the instrumentation. This test method is not intended to be used for test components larger than 12.7-mm (¹/₂-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample.

1.3.2This test method is written with the assumption that the operator understands the use of the apparatus at a level equivalent to six months of experience.

1.4The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.

1.5This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 5.

1.6This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.