Full Description

1.1This test method covers the testing of components for total hydrocarbons (THC) contribution to a gas distribution system at ambient temperature. In addition, this test method allows testing of the component at elevated ambient temperatures as high as 70C.

1.2This test method applies to in-line components containing electronics grade materials in the gaseous form, such as those used in semiconductor gas distribution systems.

1.3Limitations:

1.3.1This test method is limited by the sensitivity of current instrumentation, as well as by the response time of the instrumentation. This test method is not intended to be used for components larger than 12.7-mm (¹/₂-in.) outside diameter nominal size. This test method could be applied to larger components; however, the stated volumetric flow rate may not provide adequate mixing to ensure a representative sample. Higher flow rates may improve the mixing but excessively dilute the sample.

1.3.2Different instrumental methods (such as flame ionization detector (FID), mass spectrometer (MS)) will yield total hydrocarbon (THC) levels that are not comparable due to different sensitivities to different molecular species. Hydrocarbon contaminants of high-purity gas distribution systems can be subdivided into two general categories: (1) noncondensable hydrocarbons (C₄), that are present due to difficulty of removal and relative atmospheric abundance, and (2) condensable hydrocarbons, that are often left behind on component surfaces as residues. Condensable hydrocarbons include pump oils, degreasing agents, and polishing compound vehicles.

1.3.3Because of the tremendous disparity of hydrocarbon species, it is suggested that direct comparisons be made only among data gathered using the same detection method.

1.3.4This test method is intended for use by operators who understand the use of the apparatus at a level equivalent to six months of experience.

1.4The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.

1.5This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use. Specific hazard statements are given in Section 5.

1.6This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.