Full Description

1.1This guide covers corrosion resistant metallic alloys of the general class stainless steel, containing chromium, nickel, manganese, and silicon as major alloying additions and possibly molybdenum, that are qualified or specified for the materials of components used in high-purity gas supply systems for the semiconductor industry. This guide is primarily intended for testing to determine conformance to applicable composition and metallurgical specifications as stated in supplier product specifications or customer purchase specifications, or both.

1.2Elements analyzed and reported in this guide are as follows:

1.2.1The alloying additions chromium, nickel, and molybdenum (if specified in alloy, as in type 316L),

1.2.2The minor elements and residuals manganese, silicon, copper, cobalt, and stabilizers such as titanium and columbium (niobium), if present,

1.2.3Carbon, sulfur and phosphorus,

1.2.4Nitrogen and oxygen gases,

1.2.5Any additional minor element additions that may be made as part of the melting and casting practice, such as aluminum and calcium,

1.2.6Available standard analytical and reporting techniques are described for these elements.

1.3Metallurgical characteristics to be analyzed and reported are inclusion contents, grain structure, mechanical properties, and intergranular corrosion susceptibility.

1.4Limitations:

1.4.1This guide is limited to corrosion resistant metal alloys of the general class stated in the Scope.

1.4.2The test methods cited in this guide are not intended to preclude the use of other generally accepted techniques of demonstrated equivalent or superior precision and bias.

1.4.3Inclusion of testing and analysis procedures for any given element or metallurgical characteristic in this guide is not to be construed as being a requirement for incorporation of that element or metallurgical characteristic into any specifications.

1.5The values stated in SI units are to be regarded as the standard. The inch-pound units given in parentheses are for information only.

1.6This standard does not purport to address all of the safety concerns, if any, associated with its use. It is the responsibility of the user of this standard to establish appropriate safety, health, and environmental practices and determine the applicability of regulatory limitations prior to use.

1.7This international standard was developed in accordance with internationally recognized principles on standardization established in the Decision on Principles for the Development of International Standards, Guides and Recommendations issued by the World Trade Organization Technical Barriers to Trade (TBT) Committee.