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ISO DIS 16700
M00019807
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ISO DIS 16700 2015 Edition, September 17, 2015 MICROBEAM ANALYSIS - SCANNING ELECTRON MICROSCOPY - GUIDELINES FOR CALIBRATING IMAGE MAGNIFICATION
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Description / Abstract: This International Standard specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.