M00020018
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ISO FDIS 29301 2017 Edition, September 7, 2017 MICROBEAM ANALYSIS - ANALYTICAL TRANSMISSION ELECTRON MICROSCOPY - METHODS FOR CALIBRATING IMAGE MAGNIFICATION BY USING REFERENCE MATERIALS WITH PERIODIC STRUCTURES
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Description / Abstract: This document specifies a calibration procedure applicable to images recorded over a wide magnification range in a transmission electron microscope (TEM). The reference materials used for calibration possess a periodic structure, such as a diffraction grating replica, a super-lattice structure of semiconductor or an analysing crystal for X-ray analysis, and a crystal lattice image of carbon, gold or silicon. This document is applicable to the magnification of the TEM image recorded on a photographic film, or an imaging plate, or detected by an image sensor built into a digital camera. This document also refers to the calibration of a scale bar. This document does not apply to the dedicated critical dimension measurement TEM (CD-TEM) and the scanning transmission electron microscope (STEM).