ISO DIS 20146

Description / Abstract: This International Standard defines terms related to capacitance diaphragm gauges (CDG), specifies which parameters have to be given for capacitance diaphragm gauges, details their calibration procedure, and describes which measurement uncertainties have to be considered when operating these gauges.

This standard complements the ISO 3567 and ISO 27893 when calibrating capacitance diaphragm gauges and using them as reference standards.