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ISO DIS 13084

M00000744

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ISO DIS 13084 2017 Edition, July 7, 2017 Surface chemical analysis - Secondary-ion mass spectrometry - Calibration of the mass scale for a time-off-light secondary-ion mass spectrometer

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Description / Abstract: This International Standard specifies a method to optimize the mass calibration accuracy in timeof- flight SIMS instruments used for general analytical purposes. It is only applicable to time-of-flight instruments but is not restricted to any particular instrument design. Guidance is provided for some of the instrumental parameters that can be optimized using this procedure and the types of generic peaks suitable to calibrate the mass scale for optimum mass accuracy.