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ISO DIS 25178-607
M00000480
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ISO DIS 25178-607 2017 Edition, March 31, 2017 Geometrical product specifications (GPS) - Surface texture: Areal - Part 607: Nominal characteristics of non-contact (confocal microscopy) instruments
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Description / Abstract: This document describes the influence quantities and instrument characteristics of confocal microscopy (CM) systems for areal measurement of surface topography.