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ISO 25178-603
M00000341
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ISO 25178-603 1st Edition, October 1, 2013 Geometrical product specifications (GPS) - Surface texture: Areal - Part 603: Nominal characteristics of non-contact (phase-shifting interferometric microscopy) instruments
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Description / Abstract: This part of ISO 25178 describes the metrological characteristics of phase-shifting interferometry (PSI) profile and areal surface texture measuring microscopes.