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ISO 13424
M00000398
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ISO 13424 1st Edition, October 1, 2013 Surface chemical analysis - X-ray photoelectron spectroscopy - Reporting of results of thin-film analysis
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Description / Abstract: This International Standard specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling, peak-shape analysis, and variable photon energy XPS.