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ISO 25178-604
M00000582
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ISO 25178-604 1st Edition, August 1, 2013 Geometrical product specifications (GPS) - Surface texture: Areal - Part 604: Nominal characteristics of noncontact (coherence scanning interferometry) instruments
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Description / Abstract: This part of ISO 25178 specifies the metrological characteristics of coherence scanning interferometry (CSI) systems for 3D mapping of surface height.