M00000918
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ISO 23833 2nd Edition, April 15, 2013 Microbeam analysis - Electron probe microanalysis (EPMA) - Vocabulary
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Availability date: 07/13/2021
Description / Abstract:
This International Standard defines terms used in the practices
of electron probe microanalysis (EPMA). It covers both general and
specific concepts classified according to their hierarchy in a
systematic order.
This International Standard is applicable to all standardization
documents relevant to the practices of EPMA. In addition, some
parts of this International Standard applicable to those documents
relevant to the practices of related fields (SEM, AEM, EDX, etc.)
for definition of those terms common to them.