M00001228
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ISO 14644-9 1st Edition, August 15, 2012 Cleanrooms and associated controlled environments - Part 9: Classification of surface cleanliness by particle concentration
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Availability date: 07/13/2021
Description / Abstract:
This part of ISO 14644 establishes the classification of
cleanliness levels on solid surfaces by particle concentration in
cleanrooms and associated controlled environment applications.
Recommendations on testing and measuring methods, as well as
information about surface characteristics, are given in Annexes A
to D.
This part of ISO 14644 applies to all solid surfaces in
cleanrooms and associated controlled environments, such as walls,
ceilings, floors, working environments, tools, equipment and
products. The classification of surface cleanliness by particle
concentration (SCP) is limited to particles between 0,05 μm and 500
μm.
The following issues are not considered in this part of ISO
14644:
—requirements for the cleanliness and suitability of
surfaces for specific processes;
—procedures for the cleaning of surfaces;
—material characteristics;
—references to interactive bonding forces or generation
processes that are usually time-dependent and
process-dependent;
—selection and use of statistical methods for
classification and testing;
—other characteristics of particles, such as electrostatic
charge, ionic charges, microbiological state, etc.