M00001417
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ISO 14291 1st Edition, July 15, 2012 Vacuum gauges - Definitions and specifications for quadrupole mass spectrometers
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Availability date: 07/13/2021
Description / Abstract:
This International Standard defines terms relevant to quadrupole
mass spectrometers (QMSs) and specifies the parameters required for
specification by QMS manufacturers necessary for proper calibration
and for maintaining the quality of partial pressure
measurement.
This International Standard applies to QMSs with an ion source
of the electron impact ionization type. Such QMSs are designed for
the measurement of atomic mass-to-charge ratios m/z
typically 300. QMSs with other ion sources, such as those of
the chemical ionization, photoionization, and field ionization
types, as well as the measurements of m/z above 300, which
are mainly used to specify organic materials, lie outside the scope
of this International Standard.