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NFPA (Fire) 318
M00015583
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NFPA (Fire) 318 Standard for the Protection of Semiconductor Fabrication Facilities, 2006 edition
standard by National Fire Protection Association, 09/15/2005
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This Standard applies to semiconductor fabrication facilities and comparable research and development areas in which hazardous chemicals are used, stored, and handled and containing a cleanroom or clean zone, or both.The 2006 edition of NFPA 318 has been revised with extracted information from NFPA 5000 : Building Construction and Safety Code dealing with hazardous chemicals in cleanrooms . The document complies with NFPA's Manual of Style. (Approx. 38 pp., 2006)